Frequency fluctuations in silicon nanoresonators Supplementary Information

نویسندگان

  • Marc Sansa
  • Eric Sage
  • Elizabeth C. Bullard
  • Marc Gély
  • Thomas Alava
  • Eric Colinet
  • Akshay K. Naik
  • Luis Guillermo Villanueva
  • Laurent Duraffourg
  • Michael L. Roukes
  • Guillaume Jourdan
  • Sébastien Hentz
چکیده

Supplementary Figure S1. Complete mapping of datapoints and references of Figure 1 in the main text. 1. Chaste, J. et al. A nanomechanical mass sensor with yoctogram resolution. Nat. Nanotechnol. 7, 301–304 (2012). After annealing 2. Chaste, J. et al. A nanomechanical mass sensor with yoctogram resolution. Nat. Nanotechnol. 7, 301–304 (2012). Before annealing 3. Jensen, K., Kim, K. & Zettl, A. An atomic-resolution nanomechanical mass sensor. Nat. Nanotechnol. 3, 533–537 (2008). 4. Chiu, H.-Y., Hung, P., Postma, H. W. C. & Bockrath, M. Atomic-Scale Mass Sensing Using Carbon Nanotube Resonators. Nano Lett. 8, 4342–4346 (2008). 5. Chen, C. et al. Performance of monolayer graphene nanomechanical resonators with electrical readout. Nat. Nanotechnol. 4, 861–867 (2009). 6. Bartsch, S. T., Rusu, A. & Ionescu, A. M. Phase-locked loop based on nanoelectromechanical resonant-body field effect transistor. Appl. Phys. Lett. 101, 153116 (2012). 7. Sansa, M., Fernández-Regúlez, M., Llobet, J., San Paulo, Á. & Pérez-Murano, F. Highsensitivity linear piezoresistive transduction for nanomechanical beam resonators. Nat. Commun. 5, (2014). Frequency fluctuations in silicon nanoresonators

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تاریخ انتشار 2016